China has begun manufacturing immersion DUV lithography machines on a national scale, a technology crucial for semiconductor production. This progress strengthens Beijing's strategy to decrease its reliance on international suppliers.
New phase in technological autonomy
This project is being conducted by a state-owned enterprise based in Shanghai and represents a milestone in China's pursuit of technological sovereignty, although it still lags behind the most sophisticated equipment offered by ASML.
Details of Chinese production
As reported by Reuters, Shanghai Aishengna Electronic Technology Group is leading the manufacturing of these equipment, integrating teams from Chinese startups specializing in lithography. Founded in August 2023, the company has a registered capital of 7 billion yuan, with two state-owned corporations linked to Shanghai as its shareholders.
DUV (deep ultraviolet) technology is used to pattern circuits on silicon wafers, constituting one of the most vital stages in chip manufacturing. In immersion systems, the use of a layer of water between the lens and the wafer enables the creation of finer and more precise patterns. Applications of these systems include the manufacturing of various types of chips, the production of more advanced semiconductors through multiple exposures, the creation of alternatives for local manufacturers, and the mitigation of risks resulting from potential trade restrictions.
Challenges and comparison with global leaders
Despite this significant advance, the machines produced in China still require testing and, in the short term, should not pose a threat to the dominant position of ASML, the Dutch leader in the lithography equipment market. Reuters points out that this development is a victory for China's self-sufficiency program in semiconductors, a priority goal of President Xi Jinping.
However, experts emphasize that developing prototypes and achieving reliable mass production of equipment are distinct challenges. Analysts at JP Morgan Chase commented that producing some immersion DUV instruments differs from manufacturing tools suitable for high-volume production, where factors such as yield, alignment, speed, and reliability over thousands of production cycles are crucial.
Geopolitical context of the chip race
This initiative occurs amid restrictions imposed by the United States and the Netherlands on advanced chip manufacturing technologies. China has been barred from acquiring ASML's most complex EUV systems, which are essential for producing the most modern semiconductors.
Even with these limitations, China remains an important market for the Dutch manufacturer. According to Reuters, China accounted for approximately 16% of ASML's net sales in the first half of the year. The new equipment is expected to be delivered this year to Chinese manufacturers such as SMIC, Hua Hong Semiconductor, and ChangXin Memory Technologies (CXMT). The development also involves other companies, such as Shanghai Micro Electronics Equipment (SMEE) and Yuliangsheng.
This new phase in the Chinese semiconductor industry demonstrates that the global technological competition continues to evolve. Although domestic production of lithography machines does not completely eliminate external dependence, it expands the country's capacity to build a more autonomous chip supply chain.

